Vacuum deposition device for forming LED optical multilayer DBR films - Sapio-DBR
Optimal for the deposition of optical multilayer DBR films for LEDs!
Sapio-DBR (SGC-S1550i/S1300i series) is a vacuum deposition device specialized for optical multilayer DBR films for LEDs, offering good uniformity within the dome and enabling improved production efficiency. It is optimal for the deposition of optical multilayer DBR films for LEDs. 【Features】 ○ Excellent mass production performance → Substrate capacity: Approximately 400 pieces of φ2 inch wafers/batch Approximately 110 pieces of φ4 inch wafers/batch → Cycle time: Within 3 hours/batch → Required installation area: W4.6m × D6.3m × H3.2m * When using SGC-S1550i * Removal of the ceiling panel on the factory side may be necessary when attaching or detaching the quartz film thickness gauge. ○ Excellent reproducibility, continuous batch guarantee also available ○ Film quality adjustment is possible; we can assist with condition correction to suppress film damage due to chipping. For more details, please contact us or download the catalog.
- Company：昭和真空
- Price：Other
